Granted Patent
Utility
US 6,709,952 · App. 10/453,771
Method of forming a bottom oxide layer in a trench
Inventors:
Shih-Chi Lai, Yi-Fu Chung, Jen-Chieh Chang, Ching-Chiu Chu
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Jun 2, 2003
Inventors
Shih-Chi Lai
Yi-Fu Chung
Jen-Chieh Chang
Ching-Chiu Chu
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.