Granted Patent
Utility
US 6,709,991 · App. 09/084,578
Method of fabricating semiconductor device with capacitor
Inventors:
Jun Kawahara, Shinobu Saito, Yukihiko Maejima, Yoshihiro Hayashi
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: May 26, 1998
Inventors
Jun Kawahara
Shinobu Saito
Yukihiko Maejima
Yoshihiro Hayashi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.