Granted Patent
Utility
US 6,710,845 · App. 09/752,938
Purging gas from a photolithography enclosure between a mask protective device and a patterned mask
Inventors:
Han-Ming Wu, Ronald J. Kuse
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Dec 29, 2000
Inventors
Han-Ming Wu
Ronald J. Kuse
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.