Granted Patent
Utility
US 6,710,849 · App. 09/944,145
Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method
Inventors:
Yim-Bun Patrick Kwan, Leon Martin Levasier
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Sep 4, 2001
Inventors
Yim-Bun Patrick Kwan
Leon Martin Levasier
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.