Granted Patent
Utility
US 6,711,202 · App. 09/953,026
Discharge laser with porous insulating layer covering anode discharge surface
Inventor:
Richard G. Morton
Patented Case
View Patent ↗
Granted: Mar 23, 2004
Filed: Sep 13, 2001
Inventor
Richard G. Morton
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.