Granted Patent
Utility
US 6,712,213 · App. 10/307,894
Wafer carrier door and latching mechanism withhourglass shaped key slot
Inventor:
Shawn D. Eggum
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Dec 2, 2002
Inventor
Shawn D. Eggum
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.