Granted Patent
Utility
US 6,712,673 · App. 09/682,677
Polishing apparatus, polishing head and method
Inventors:
Peter Albrecht, Ashley Hull, David Vadnais
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Oct 4, 2001
Inventors
Peter Albrecht
Ashley Hull
David Vadnais
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.