Granted Patent
Utility
US 6,712,679 · App. 09/925,254
Platen assembly having a topographically altered platen surface
Inventors:
Travis R. Taylor, Cangshan Xu, Kevin T. Crofton, Eugene Zhao
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Aug 8, 2001
Inventors
Travis R. Taylor
Cangshan Xu
Kevin T. Crofton
Eugene Zhao
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.