Granted Patent
Utility
US 6,713,342 · App. 10/282,759
FeRAM sidewall diffusion barrier etch
Inventors:
Francis G. Celii, Scott R. Summerfelt, Tomoyuki Sakoda, Chiu Chi
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Oct 29, 2002
Inventors
Francis G. Celii
Scott R. Summerfelt
Tomoyuki Sakoda
Chiu Chi
Assignees (at issue)
Texas Instruments Incorporated
Agilent Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.