Granted Patent
Utility
US 6,713,370 · App. 10/460,901
Process for the preparation of an ideal oxygen precipitating silicon wafer capable of forming an enhanced denuded zone
Inventor:
Robert J. Falster
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Jun 13, 2003
Inventor
Robert J. Falster
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.