Granted Patent
Utility
US 6,713,770 · App. 10/098,975
High resolution spectral measurement device
Inventors:
Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Scott T. Smith, Daniel J. W. Brown
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Mar 15, 2002
Inventors
Richard L. Sandstrom
Alexander I. Ershov
William N. Partlo
Igor V. Fomenkov
Scott T. Smith
Daniel J. W. Brown
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.