Granted Patent
Utility
US 6,714,768 · App. 09/921,900
Structure and method for fabricating semiconductor structures and polarization modulator devices utilizing the formation of a compliant substrate
Inventor:
Robert Lempkowski
Patented Case
View Patent ↗
Granted: Mar 30, 2004
Filed: Aug 6, 2001
Inventor
Robert Lempkowski
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.