Granted Patent
Utility
US 6,716,084 · App. 10/043,656
Carrier head for holding a wafer and allowing processing on a front face thereof to occur
Inventors:
Bulent M. Basol, Cyprian Emeka Uzoh, Konstantin Volodarsky
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Jan 8, 2002
Inventors
Bulent M. Basol
Cyprian Emeka Uzoh
Konstantin Volodarsky
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.