Granted Patent
Utility
US 6,716,271 · App. 10/282,377
Apparatus and method for inhibiting decomposition of germane
Inventors:
Jose I. Arno, Edward A. Sturm, Luping Wang, James Dietz
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Oct 29, 2002
Inventors
Jose I. Arno
Edward A. Sturm
Luping Wang
James Dietz
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.