Granted Patent
Utility
US 6,716,558 · App. 10/291,116
Transparent phase shift mask for fabrication of small feature sizes
Inventor:
George Talor
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Nov 8, 2002
Inventor
George Talor
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.