Granted Patent
Utility
US 6,716,573 · App. 10/178,239
Resist Composition
Inventors:
Hirotoshi Fujie, Tsuneaki Maesawa, Yasuyoshi Mori
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Jun 25, 2002
Inventors
Hirotoshi Fujie
Tsuneaki Maesawa
Yasuyoshi Mori
Assignee (at issue)
WAKO PURE CHEMICAL INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.