Granted Patent
Utility
US 6,716,658 · App. 09/725,572
Method of preventing generation of particles in chamber
Inventor:
Keun No Park
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Nov 30, 2000
Inventor
Keun No Park
Assignee (at issue)
LG.Philips LD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.