Granted Patent
Utility
US 6,716,751 · App. 10/074,149
Dopant precursors and processes
Inventor:
Michael A. Todd
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Feb 11, 2002
Inventor
Michael A. Todd
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.