Granted Patent
Utility
US 6,716,772 · App. 10/223,981
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
Inventors:
Norikazu Mizuno, Kiyohiko Maeda
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Aug 20, 2002
Inventors
Norikazu Mizuno
Kiyohiko Maeda
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.