Granted Patent
Utility
US 6,717,113 · App. 10/188,546
Method for substrate thermal management
Inventor:
Dikran Babikian
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Jul 2, 2002
Inventor
Dikran Babikian
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.