Granted Patent
Utility
US 6,717,263 · App. 10/282,012
Semiconductor device having contact opening smaller than test probe, and manufacturing process and inspecting method thereof
Inventors:
Keiichi Sawai, Osamu Jinushi
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Oct 29, 2002
Inventors
Keiichi Sawai
Osamu Jinushi
Assignee (at issue)
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.