Granted Patent
Utility
US 6,717,685 · App. 09/502,062
In situ proximity gap monitor for lithography
Inventor:
Alek Chi-Heng Chen
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Feb 10, 2000
Inventor
Alek Chi-Heng Chen
Assignees (at issue)
BAE Systems Information
Electronic Systems Integration Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.