Granted Patent
Utility
US 6,718,293 · App. 09/372,595
Etching and growth simulation method using a modified cell model
Inventors:
Jae-Hee Ha, Sang-Heup Moon, Byeong-Ok Cho, Sung-Wook Hwang
Patented Case
View Patent ↗
Granted: Apr 6, 2004
Filed: Aug 12, 1999
Inventors
Jae-Hee Ha
Sang-Heup Moon
Byeong-Ok Cho
Sung-Wook Hwang
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.