IP Library Granted Patent US 6,718,821
Granted Patent Utility
US 6,718,821 · App. 10/010,095

Laser interferometry force-feedback sensor for an interfacial force microscope

Inventors: Jack E. Houston, William L. Smith
Patented Case View Patent ↗
Granted: Apr 13, 2004 Filed: Nov 7, 2001
Inventors
Jack E. Houston
William L. Smith
Assignee (at issue)
Sandia Corporation

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Quick Facts
Patent No.
US 6,718,821
App. No.
10/010,095
Filed
2001-11-07
Granted
2004-04-13
Kind
B1