Granted Patent
Utility
US 6,719,920 · App. 10/002,855
Slurry for polishing a barrier layer
Inventor:
Anne Miller
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Nov 30, 2001
Inventor
Anne Miller
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.