Granted Patent
Utility
US 6,720,118 · App. 10/423,733
Enhanced inspection of extreme ultraviolet mask
Inventors:
Pei-Yang Yan, Ted Liang, Guojing Zhang
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Apr 25, 2003
Inventors
Pei-Yang Yan
Ted Liang
Guojing Zhang
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.