Granted Patent
Utility
US 6,720,194 · App. 10/262,737
Semiconductor characterization and production information system
Inventors:
William E. Miller, Shehanshu Shah, Thomas S. Martis
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Oct 2, 2002
Inventors
William E. Miller
Shehanshu Shah
Thomas S. Martis
Assignee (at issue)
Siverion, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.