Granted Patent
Utility
US 6,720,259 · App. 10/262,992
Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition
Inventors:
Ana R. Londergan, Sasangan Ramanathan, Jereld Lee Winkler, Thomas E. Seidel
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Oct 2, 2002
Inventors
Ana R. Londergan
Sasangan Ramanathan
Jereld Lee Winkler
Thomas E. Seidel
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.