IP Library › Granted Patent US 6,720,271
Granted Patent Utility
US 6,720,271 · App. 10/189,152

Process for removing polymers during the fabrication of semiconductor devices

Inventors: Enrico Bellandi, Francesco Pipia, Mauro Alessandri
Patented Case View Patent ↗
Granted: Apr 13, 2004 Filed: Jul 2, 2002
Inventors
Enrico Bellandi
Francesco Pipia
Mauro Alessandri
Assignee (at issue)
STMICROELECTRONICS S.r.l.

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Quick Facts
Patent No.
US 6,720,271
App. No.
10/189,152
Filed
2002-07-02
Granted
2004-04-13
Kind
B2