Granted Patent
Utility
US 6,721,036 · App. 09/827,350
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Arie Cornelis Scheiberlich, Menno Fien, Evert Hendrik Jan Draaijer
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Apr 6, 2001
Inventors
Arie Cornelis Scheiberlich
Menno Fien
Evert Hendrik Jan Draaijer
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.