Granted Patent
Utility
US 6,721,098 · App. 09/748,625
Triple electrode MOEMS tunable filter and fabrication process therefor
Inventor:
Walid A. Atia
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Dec 22, 2000
Inventor
Walid A. Atia
Assignee (at issue)
Axsun Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.