Granted Patent
Utility
US 6,721,389 · App. 09/934,681
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors, Erik Roelof Loopstra
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Aug 23, 2001
Inventors
Jan Evert Van Der Werf
Mark Kroon
Wilhelmus Cornelis Keur
Vadim Yevgenyevich Banine
Hans Van Der Laan
Johannes Hubertus Josephina Moors
Erik Roelof Loopstra
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.