Granted Patent
Utility
US 6,723,488 · App. 10/037,161
Photoresist composition for deep UV radiation containing an additive
Inventors:
Takanori Kudo, Ralph R. Dammel, Munirathna Padmanaban
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Nov 7, 2001
Inventors
Takanori Kudo
Ralph R. Dammel
Munirathna Padmanaban
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.