IP Library › Granted Patent US 6,723,601
Granted Patent Utility
US 6,723,601 · App. 10/321,815

Method for manufacturing semiconductor memory device using hemispherical grain silicon

Inventors: Se Min Lee, Dong Hwan Kim, Keun-Il Lee
Patented Case View Patent ↗
Granted: Apr 20, 2004 Filed: Dec 18, 2002
Inventors
Se Min Lee
Dong Hwan Kim
Keun-Il Lee
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.

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Quick Facts
Patent No.
US 6,723,601
App. No.
10/321,815
Filed
2002-12-18
Granted
2004-04-20
Kind
B2