Granted Patent
Utility
US 6,724,460 · App. 09/988,830
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
Inventors:
Willem Van Schaik, Antonie Ellert Duisterwinkel, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Nov 19, 2001
Inventors
Willem Van Schaik
Antonie Ellert Duisterwinkel
Bastiaan Mertens
Hans Meiling
Norbertus Benedictus Koster
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.