Granted Patent
Utility
US 6,725,099 · App. 09/894,061
Ramp rate limiter to control stress during ramping
Inventors:
Mark Erickson, Thorkell Gudmundsson, Sunil Shah
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Jun 27, 2001
Inventors
Mark Erickson
Thorkell Gudmundsson
Sunil Shah
Assignee (at issue)
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.