Granted Patent
Utility
US 6,725,402 · App. 09/629,073
Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
Inventors:
Elfido Coss, Jr., Qingsu Wang, Terrence J. Riley
Patented Case
View Patent ↗
Granted: Apr 20, 2004
Filed: Jul 31, 2000
Inventors
Elfido Coss, Jr.
Qingsu Wang
Terrence J. Riley
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.