Granted Patent
Utility
US 6,726,528 · App. 10/146,494
Polishing pad with optical sensor
Inventor:
Greg Barbour
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: May 14, 2002
Inventor
Greg Barbour
Assignee (at issue)
Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.