Granted Patent
Utility
US 6,726,769 · App. 10/304,646
Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
Inventors:
Vadim Boguslavskiy, Alexander I. Gurary
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: Nov 26, 2002
Inventors
Vadim Boguslavskiy
Alexander I. Gurary
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.