Granted Patent
Utility
US 6,727,142 · App. 10/284,508
Orientation independent oxidation of nitrided silicon
Inventors:
Oleg Gluschenkov, Suryanarayan G. Hegde, Helmut Tews
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: Oct 29, 2002
Inventors
Oleg Gluschenkov
Suryanarayan G. Hegde
Helmut Tews
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.