Granted Patent
Utility
US 6,727,178 · App. 10/419,179
Etchant and method of etching
Inventors:
Noriyuki Saitou, Takuji Yoshida, Kazunori Inoue, Makoto Ishikawa, Yoshio Kamiharaguchi
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: Apr 21, 2003
Inventors
Noriyuki Saitou
Takuji Yoshida
Kazunori Inoue
Makoto Ishikawa
Yoshio Kamiharaguchi
Assignees (at issue)
MITSUBISHI CHEMICAL CORPORATION
Advanced Display, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.