Granted Patent
Utility
US 6,727,658 · App. 10/383,953
Electron beam generating apparatus and electron beam exposure apparatus
Inventors:
Yoshihisa Ooae, Yoichi Shimizu, Takamasa Satoh, Takeshi Haraguchi
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: Mar 7, 2003
Inventors
Yoshihisa Ooae
Yoichi Shimizu
Takamasa Satoh
Takeshi Haraguchi
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.