Granted Patent
Utility
US 6,727,989 · App. 09/597,123
Enhanced overlay measurement marks for overlay alignment and exposure tool condition control
Inventors:
Xiaoming Yin, Christopher Gould, Gerhard Kunkel
Patented Case
View Patent ↗
Granted: Apr 27, 2004
Filed: Jun 20, 2000
Inventors
Xiaoming Yin
Christopher Gould
Gerhard Kunkel
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.