IP Library Granted Patent US 6,728,946
Granted Patent Utility
US 6,728,946 · App. 09/703,294

Method and apparatus for creating photolithographic masks

Inventors: Franklin Mark Schellenberg, Patrick J. LaCour
Patented Case View Patent ↗
Granted: Apr 27, 2004 Filed: Oct 31, 2000
Inventors
Franklin Mark Schellenberg
Patrick J. LaCour

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Quick Facts
Patent No.
US 6,728,946
App. No.
09/703,294
Filed
2000-10-31
Granted
2004-04-27
Kind
B1