Granted Patent
Utility
US 6,729,561 · App. 09/976,134
Cleaning nozzle and substrate cleaning apparatus
Inventors:
Sadao Hirae, Masanobu Sato, Shuichi Yasuda
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Oct 11, 2001
Inventors
Sadao Hirae
Masanobu Sato
Shuichi Yasuda
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.