Granted Patent
Utility
US 6,730,528 · App. 08/999,401
Mask set for measuring an overlapping error and method of measuring an overlapping error using the same
Inventor:
Ki Yeop Park
Patented Case
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Granted: May 4, 2004
Filed: Dec 22, 1997
Inventor
Ki Yeop Park
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.