Granted Patent
Utility
US 6,730,607 · App. 09/882,289
Method for fabricating a barrier layer
Inventors:
Helmut Wurzer, Martin Schrems, Anke Krasemann, Thomas Pompl
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Jun 15, 2001
Inventors
Helmut Wurzer
Martin Schrems
Anke Krasemann
Thomas Pompl
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.