Granted Patent
Utility
US 6,730,614 · App. 10/645,671
Method of forming a thin film in a semiconductor device
Inventors:
Jung Wook Lim, Sun Jin YUN, Jin Ho Lee
Patented Case
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Granted: May 4, 2004
Filed: Aug 22, 2003
Inventors
Jung Wook Lim
Sun Jin YUN
Jin Ho Lee
Assignee (at issue)
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.