Granted Patent
Utility
US 6,731,374 · App. 10/307,407
Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system
Inventor:
Harry Sewell
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Dec 2, 2002
Inventor
Harry Sewell
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.