Granted Patent
Utility
US 6,731,384 · App. 09/973,000
Apparatus for detecting foreign particle and defect and the same method
Inventors:
Yoshimasa Ohshima, Minori Noguchi, Hidetoshi Nishiyama, Kenji Mitomo, Takashi Okawa, Akira Hamamatsu, Shinichi Suzuki
Patented Case
View Patent ↗
Granted: May 4, 2004
Filed: Oct 10, 2001
Inventors
Yoshimasa Ohshima
Minori Noguchi
Hidetoshi Nishiyama
Kenji Mitomo
Takashi Okawa
Akira Hamamatsu
Shinichi Suzuki
Assignees (at issue)
HITACHI, LTD.
Hitachi Electronics Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.